Product development of a MEMS optical scanner for a laser scanning microscope

被引：5

作者：

Miyajima, H ^{[1
]}

Asaoka, N ^{[1
]}

Isokawa, T ^{[1
]}

Ogata, M ^{[1
]}

Aoki, Y ^{[1
]}

Imai, M ^{[1
]}

Fujimori, O ^{[1
]}

Katashiro, M ^{[1
]}

Matsumoto, K ^{[1
]}

机构：

[1] Olympus Opt Co Ltd, Hachioji, Tokyo 1928512, Japan

来源：

FIFTEENTH IEEE INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS, TECHNICAL DIGEST | 2002年

关键词：

D O I：

10.1109/MEMSYS.2002.984331

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

A MEMS electromagnetic optical scanner for horizontal scanning in a laser scanning microscope has been developed. Although few MEMS actuators have been commercialized to date, it has successfully satisfied all the specifications including not only the fundamentals such as resonant frequency and maximum scan angle but also the ones for the commercial product such as scanning stability and reliability. It will be commercialized as a part of our produce OLS1100 (Fig. 1 in the second half of FY 2001.

引用

页码：552 / 555

页数：4