Micromachined polycrystalline thin film temperature sensors

被引：24

作者：

Jiang, LN

Wong, M

Zohar, Y

机构：

[1] Hong Kong Univ Sci & Technol, Dept Mech Engn, Hong Kong, Peoples R China

[2] Hong Kong Univ Sci & Technol, Dept Elect & Elect Engn, Hong Kong, Peoples R China

来源：

MEASUREMENT SCIENCE AND TECHNOLOGY | 1999年 / 10卷 / 08期

关键词：

temperature microsensors; polycrystalline semiconductors; thermoresistors; integrated microsystems;

D O I：

10.1088/0957-0233/10/8/301

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

Polycrystalline thin films based on two elemental semiconducting materials, Si and Ge, have been utilized to fabricate microthermistors. The thermistors are designed in a heavy-light-heavy doping concentration arrangement. The design, fabrication, analysis and characterization of a variety of thermistors under different doping schemes is described. Finally, the operation of the thermistors in self-heating operation is discussed. The results provide a systematic framework for the application of semiconducting microthermoresistors.

引用

页码：653 / 664

页数：12