Co-ITO granular magnetoresistance films fabricated by precipitation of magnetic nanoparticles from amorphous oxide

被引:3
作者
Ekawati, W
Shi, J
Nakamura, Y
Nittono, O
机构
[1] Tokyo Inst Technol, Dept Met & Ceram Sci, Meguro Ku, Tokyo 1528552, Japan
[2] Fukushima Univ, Fac Symbiot Syst Sci, Fukushima 9601296, Japan
来源
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A | 2006年 / 24卷 / 02期
关键词
D O I
10.1116/1.2165662
中图分类号
TB3 [工程材料学];
学科分类号
0805 ; 080502 ;
摘要
Fabricaton of Cobalt-Indium tin oxide (Co-ITO) granular magnetoresistance films using precipitation of magnetic nanoparticles from amorphous oxide was investigated. An amorphous phase containing magnetic atoms and the magnetic particles precipitate from the amorphous phase through thermal annealing at 300 ° or above were prepared. A two facing target dc magnetron sputtering system is used to prepare the Co-ITO films and the structural properties were characterized by X ray diffraction (XRD). Results show that the solubility of Co in amorphous ITO matrix is not sufficient for the purpose to fabricate magnetoresistance Co-ITO granular films by the two-step method.
引用
收藏
页码:L1 / L3
页数:3
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