Large 1/f noise in polysilicon TFT loads and its effects on the stability of SRAM cells

被引:18
作者
Aoki, M [1 ]
Hashimoto, T [1 ]
Yamanaka, T [1 ]
Nagano, T [1 ]
机构
[1] HITACHI LTD,SEMICOND & INTEGRATED CIRCUITS DIV,KOKUBUNJI,TOKYO 185,JAPAN
来源
JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS | 1996年 / 35卷 / 2B期
关键词
polysilicon TFT; drain current fluctuation; 1/f noise; SRAM; cell stability; grain-boundary barrier;
D O I
10.1143/JJAP.35.838
中图分类号
O59 [应用物理学];
学科分类号
摘要
We have observed very large drain current fluctuations over time in polysilicon thin film transistors (TFTs). The noise with 1/f power spectra in TFTs is found to be about 10(4) times larger than that in single-crystalline Si metal oxide semiconductor (MOS) transistors. The influence of 1/f noise in TFTs on static random access memory (SRAM) cell stability is clarified for the first time. Maintaining a high on-current and lowering of the grain-boundary barrier are found to be essential for increasing stability.
引用
收藏
页码:838 / 841
页数:4
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