Influence of anti-symmetric wave aberrations and the simple correction filter in the Fourier space

被引:9
作者
Ikuta, T [1 ]
机构
[1] Osaka Electrocommun Univ, Fac Engn, Dept Lightwave Sci, Neyagawa, Osaka 5728530, Japan
来源
JOURNAL OF ELECTRON MICROSCOPY | 1999年 / 48卷 / 04期
关键词
anti-symmetric wave aberration; primary coma aberration; coma aberration correction; high-resolution electron microscopy;
D O I
10.1093/oxfordjournals.jmicro.a023697
中图分类号
TH742 [显微镜];
学科分类号
摘要
In imaging systems, especially in a high-resolution transmission electron microscope, residual aberrations of objective lenses, such as a spherical aberration or coma aberration, degrade the quality of observed images. Recently practical solutions by the use of an aberration-corrected lens or real-time image processing based on active defocus modulation have been reported with respect to the spherical aberration. Therefore, the future should be aimed at correcting other aberrations such as coma or higher-order astigmatisms. This paper describes the influence of such higher-order aberrations, and a preliminary attempt to correct the coma aberration for observed images under the coherent vertical illumination using an optical microscope. In addition, an estimation technique for the amplitude and the direction of the coma aberration using an image as is observed, is also discussed.
引用
收藏
页码:417 / 429
页数:13
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