Evaluation of the plasma distribution of a quasi-linear constricted plasma source

The quasi-linear constricted plasma source is a downstream plasma source with ten linearly aligned discharge cells, Each cell operates on the basis of a constricted glow discharge, The plasma output can easily be monitored by the plasma-emitted light, The information is not only intuitive but can also be used to operate on-line feedback control of the plasma source which is important for large area plasma processing of materials.