SAW LSAW COM parameter extraction from computer experiments with harmonic admittance of a periodic array of electrodes

被引:40
作者
Koskela, J [1 ]
Plessky, VP
Salomaa, MM
机构
[1] Helsinki Univ Technol, Phys Mat Lab, FIN-02015 Hut, Finland
[2] Micronas Semicond SA, CH-2022 Bevaix, Switzerland
关键词
D O I
10.1109/58.775644
中图分类号
O42 [声学];
学科分类号
070206 ; 082403 ;
摘要
A novel numerical method for determining the surface acoustic wave and the leaky surface acoustic wave characteristics is proposed. The Green's function method is used to simulate an infinite periodic transducer driven by a periodic voltage. We show that the coupling of modes parameters and the dispersion relation can be extracted from the change in the admittance as the periodicity of the driving voltage is slightly shifted. The method first introduced here leads to significant savings in computing time.
引用
收藏
页码:806 / 816
页数:11
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