Frequency-multiplex Fourier-transform profilometry: A single-shot three-dimensional shape measurement of objects with large height discontinuities and/or surface isolations

被引:197
作者
Takeda, M
Gu, Q
Kinoshita, M
Takai, H
Takahashi, Y
机构
[1] Department of Communication and Systems Engineering, University of Electro-Communications, Tokyo, 182, 1-5-1, Chofugaoka, Chofu
[2] International Digital Communication Inc, Tokyo, 5-20-8, Asakusabashi, Taito-ku
[3] Mitsubishi Electric Corporation, Tokyo, 141, 2-20-1, Nishigotanda, Shinagawa
来源
APPLIED OPTICS | 1997年 / 36卷 / 22期
关键词
phase unwrapping; profilometry; fringe analysis; optical metrology; heterodyne interferometry; Fourier transform;
D O I
10.1364/AO.36.005347
中图分类号
O43 [光学];
学科分类号
070207 ; 0803 ;
摘要
The performance of Fourier-transform profilometry is enhanced by a new technique that is based on spatial frequency multiplexing combined with the Gushov-Solodkin phase unwrapping algorithm. The technique permits the three-dimensional shape measurement of objects that have discontinuous height steps and/or spatially isolated surfaces, which has not been possible by conventional Fourier-transform profilometry. An important feature of the technique is that it requires only a single fringe pattern; the single-shot recording makes possible the instantaneous three-dimensional shape measurement of discontinuous objects in fast motion. Experimental results are presented that demonstrate the validity of the principle. (C) 1997 Optical Society of America.
引用
收藏
页码:5347 / 5354
页数:8
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