Anomalies in thickness measurements of graphene and few layer graphite crystals by tapping mode atomic force microscopy

被引：505

作者：

Nemes-Incze, P. ^{[1
]}

Osvath, Z. ^{[1
]}

Kamaras, K. ^{[2
]}

Biro, L. P. ^{[1
]}

机构：

[1] Hungarian Acad Sci, Res Inst Tech Phys & Mat Sci, H-1525 Budapest, Hungary

[2] Hungarian Acad Sci, Res Inst Solid State Phys & Opt, H-1525 Budapest, Hungary

来源：

CARBON | 2008年 / 46卷 / 11期

基金：

匈牙利科学研究基金会;

关键词：

D O I：

10.1016/j.carbon.2008.06.022

中图分类号：

O64 [物理化学（理论化学）、化学物理学];

学科分类号：

070304 ; 081704 ;

摘要：

Atomic Force Microscopy (AFM) in the tapping (intermittent contact) mode is a commonly used tool to measure the thickness of graphene and few layer graphene (FLG) flakes on silicon oxide surfaces. It is a convenient tool to quickly determine the thickness of individual FLG films. However, reports from literature show a large variation of the measured thickness of graphene layers. This paper is focused on the imaging mechanism of tapping mode AFM (TAFM) when measuring graphene and FLG thickness, and we show that at certain measurement parameters significant deviations can be introduced in the measured thickness of FLG flakes. An increase of as much as 1 nm can be observed in the measured height of FLG crystallites, when using an improperly chosen range of free amplitude values of the tapping cantilever. We present comparative Raman spectroscopy and TAFM measurements on selected single and multilayer graphene films, based on which we suggest ways to correctly measure graphene and FLG thickness using TAFM. (C) 2008 Elsevier Ltd. All rights reserved.

引用

页码：1435 / 1442

页数：8

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