Nanostructure characterization of tungsten-containing nanorods deposited by electron-beam-induced chemical vapour decomposition

被引：33

作者：

Han, M ^{[1
]}

Mitsuishi, K ^{[1
]}

Shimojo, M ^{[1
]}

Furuya, K ^{[1
]}

机构：

[1] Natl Inst Mat Sci, Nanomat Lab, Tsukuba, Ibaraki 3050003, Japan

来源：

PHILOSOPHICAL MAGAZINE | 2004年 / 84卷 / 12期

关键词：

D O I：

10.1080/14786430310001646772

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

Electron-beam-induced chemical vapour decomposition was performed in a scanning transmission electron microscope using a precursor of tungsten carbonyl (W(CO) (6)). The self-supporting nanorods were grown from the edges of a C film with widths that depend on the electron-beam scanning speed used in the fabrication process. The nanostructure of as-deposited nanorods has been characterized in detail using energy-dispersive X-ray spectroscopy, selected-area electron diffraction, microdiffraction and high-resolution transmission electron microscopy. A mixture of nanocrystallites and amorphous phases was observed for all beam scanning speeds used for deposition. High-resolution transmission electron microscopy demonstrated that the size of nanocrystallites in as-deposited nanorods ranges between 1.5 and 2.0 nm. The direct evidence of the presence of pure W nanocrystallites in as-deposited nanorods was revealed by microdiffraction.

引用

页码：1281 / 1289

页数：9

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