New technique of the X-ray efficiency measurement of a charge-coupled device with a subpixel resolution

被引:56
作者
Tsunemi, H
Yoshita, K
Kitamoto, S
机构
来源
JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS BRIEF COMMUNICATIONS & REVIEW PAPERS | 1997年 / 36卷 / 5A期
关键词
charge-coupled-device; gate structure; detection efficiency; subpixel resolution;
D O I
10.1143/JJAP.36.2906
中图分类号
O59 [应用物理学];
学科分类号
摘要
We report the use of a new technique to measure the X-ray detection efficiency of a charge-coupled device (CCD) with subpixel resolution. The new technique makes use of a parallel X-ray beam and metal mesh placed just in front, of the CCD. The CCD camera we used is a conventional system using the TC213 (Texas Instrument Japan (TIJ)) whose pixel size is 12 mu m x 12 mu m with one million pixels. The mesh has 4 mu m diameter holes spaced at 12 mu m intervals, We produced an efficiency map within a typical pixel showing the gale structure in detail: a virtual gate, a clack gate and an antiblooming gate. The gate structure we measured is consistent with the manufacturer's design value. By selecting single pixel events, We detected a pixel boundary additional plans for application will also be discussed.
引用
收藏
页码:2906 / 2911
页数:6
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