Transmission laser microscope using the phase-shifting technique and its application to measurement of optical waveguides

被引:32
作者
Endo, J [1 ]
Chen, J
Kobayashi, D
Wada, Y
Fujita, H
机构
[1] Hitachi Ltd, Adv Res Lab, Hatoyama, Saitama 3500395, Japan
[2] Tokyo Inst Polytech, Fac Engn, Kanagawa 2430297, Japan
[3] Tokyo Denki Univ, Coll Engn, Tokyo 1018457, Japan
[4] Univ Tokyo, Inst Ind Sci, Tokyo 1538505, Japan
[5] Japan Sci & Technol Corp, Core Res Evolut Sci & Technol Program, Kawaguchi, Saitama 3320012, Japan
关键词
D O I
10.1364/AO.41.001308
中图分类号
O43 [光学];
学科分类号
070207 ; 0803 ;
摘要
A type of a transmission phase-shifting laser microscope, believed to be new, has been developed. In this microscope a biprism located between a magnifying lens and an observation plane was used as a beam splitter. The biprism is laterally translated to introduce phase shifts required for quantitative phase measurement with a phase-shifting technique. The disturbance caused by a Fresnel-diffracted wave from the splitting edge of the biprism is reduced by placement of a linear beam stopper at the center of an intermediate image plane, As the first application, the developed microscope is used to measure a refractive-index distribution in optical waveguides. A difference of refractive indices of less than 6 x 10(-5) is clearly measured in the submicrometer region. (C) 2002 Optical Society of America.
引用
收藏
页码:1308 / 1314
页数:7
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