A hybrid Silicon-On-Glass (SOG) lateral micro-accelerometer with CMOS readout circuitry

被引：25

作者：

Chae, J ^{[1
]}

Kulah, H ^{[1
]}

Najafi, K ^{[1
]}

机构：

[1] Univ Michigan, Ctr Wireless Integrated MicroSyst, Ann Arbor, MI 48109 USA

来源：

FIFTEENTH IEEE INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS, TECHNICAL DIGEST | 2002年

关键词：

inertial sensors; mu a accelerometer; sigma-delta;

D O I：

10.1109/MEMSYS.2002.984348

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

A hybrid micro-accelerometer system consisting of a new bulk Silicon-On-Glass (SOG) lateral capacitive microaccelerometer and a CMOS interface circuit is presented. The accelerometer has a 120mum-thick proof mass, 2.2mm x 3.0mm in size with 3.2mum sensing gap defined by DRIE. The circuit has a 95dB dynamic range, a low offset of 370muV and can resolve better than 75aF. The hybrid system has a measured sensitivity of 40mV/g and resolution of 100mug/rootHz.

引用

页码：623 / 626

页数：4

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