Surface structure of GaN(0001) in the chemical vapor deposition environment

被引:42
作者
Munkholm, A
Stephenson, GB
Eastman, JA
Thompson, C
Fini, P
Speck, JS
Auciello, O
Fuoss, PH
DenBaars, SP
机构
[1] Argonne Natl Lab, Div Chem, Argonne, IL 60439 USA
[2] Argonne Natl Lab, Div Sci Mat, Argonne, IL 60439 USA
[3] No Illinois Univ, Dept Phys, De Kalb, IL 60115 USA
[4] Univ Calif Santa Barbara, Dept Mat, Santa Barbara, CA 93106 USA
[5] AT&T Labs Res, Florham Pk, NJ 07932 USA
关键词
D O I
10.1103/PhysRevLett.83.741
中图分类号
O4 [物理学];
学科分类号
0702 ;
摘要
We report the first observation of the atomic-scale structure of the GaN(0001) surface in the metalorganic chemical vapor deposition environment. Measurements were performed using in situ grazing-incidence x-ray scattering. We determined the surface equilibrium phase diagram as a function of temperature and ammonia partial pressure, which contains two phases with 1 X 1 and (root 3 X 2 root 3)R30 degrees symmetries. The (root 5 X 2 root 5)R30 degrees phase is found to have a novel "missing row" structure with 1/3 of the surface Ga atoms absent.
引用
收藏
页码:741 / 744
页数:4
相关论文
共 27 条
[1]   Surface kinetics of zinc-blende (001)GaN [J].
Brandt, O ;
Yang, H ;
Ploog, KH .
PHYSICAL REVIEW B, 1996, 54 (07) :4432-4435
[2]   EXPERIMENTAL CONSIDERATIONS FOR INSITU X-RAY-SCATTERING ANALYSIS OF OMVPE GROWTH [J].
BRENNAN, S ;
FUOSS, PH ;
KAHN, JL ;
KISKER, DW .
NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION A-ACCELERATORS SPECTROMETERS DETECTORS AND ASSOCIATED EQUIPMENT, 1990, 291 (1-2) :86-92
[3]   Ab initio calculation of the stoichiometry and structure of the (0001) surfaces of GaN and AlN [J].
Fritsch, J ;
Sankey, OF ;
Schmidt, KE ;
Page, JB .
PHYSICAL REVIEW B, 1998, 57 (24) :15360-15371
[4]   Monitoring surface stoichiometry with the (2x2) reconstruction during growth of hexagonal-phase GaN by molecular beam epitaxy [J].
Hacke, P ;
Feuillet, G ;
Okumura, H ;
Yoshida, S .
APPLIED PHYSICS LETTERS, 1996, 69 (17) :2507-2509
[5]  
HAMERS RJ, 1992, SCANNING TUNNELING I, V1
[6]  
HELLMAN ES, 1998, MRS INTRNET J NITRID, V3
[7]  
KASPAR JS, 1967, INT TABLES XRAY CRYS, V2, P326
[8]   ROLE OF CHEMICAL-POTENTIALS IN SURFACE RECONSTRUCTION - A NEW MODEL AND PHASE-TRANSITION ON GAAS(111)2X2 [J].
KAXIRAS, E ;
PANDEY, KC ;
BARYAM, Y ;
JOANNOPOULOS, JD .
PHYSICAL REVIEW LETTERS, 1986, 56 (26) :2819-2822
[9]   Growth model for GaN with comparison to structural, optical, and electrical properties [J].
Koleske, DD ;
Wickenden, AE ;
Henry, RL ;
DeSisto, WJ ;
Gorman, RJ .
JOURNAL OF APPLIED PHYSICS, 1998, 84 (04) :1998-2010
[10]   X-RAY-SCATTERING ANALYSIS OF SURFACE-STRUCTURES PRODUCED BY VAPOR-PHASE EPITAXY OF GAAS [J].
LAMELAS, FJ ;
FUOSS, PH ;
KISKER, DW ;
STEPHENSON, GB ;
IMPERATORI, P ;
BRENNAN, S .
PHYSICAL REVIEW B, 1994, 49 (03) :1957-1965