Calibration of rectangular atomic force microscope cantilevers

被引:1703
作者
Sader, JE [1 ]
Chon, JWM
Mulvaney, P
机构
[1] Univ Melbourne, Dept Math & Stat, Parkville, Vic 3052, Australia
[2] Univ Melbourne, Sch Chem, Parkville, Vic 3052, Australia
关键词
D O I
10.1063/1.1150021
中图分类号
TH7 [仪器、仪表];
学科分类号
0804 ; 080401 ; 081102 ;
摘要
A method to determine the spring constant of a rectangular atomic force microscope cantilever is proposed that relies solely on the measurement of the resonant frequency and quality factor of the cantilever in fluid (typically air), and knowledge of its plan view dimensions. This method gives very good accuracy and improves upon the previous formulation by Sader [Rev. Sci. Instrum. 66, 3789 (1995)] which, unlike the present method, requires knowledge of both the cantilever density and thickness. (C) 1999 American Institute of Physics. [S0034-6748(99)04210-0].
引用
收藏
页码:3967 / 3969
页数:3
相关论文
共 14 条
[1]  
CHON JWM, UNPUB J APPL PHYS
[2]   A NONDESTRUCTIVE METHOD FOR DETERMINING THE SPRING CONSTANT OF CANTILEVERS FOR SCANNING FORCE MICROSCOPY [J].
CLEVELAND, JP ;
MANNE, S ;
BOCEK, D ;
HANSMA, PK .
REVIEW OF SCIENTIFIC INSTRUMENTS, 1993, 64 (02) :403-405
[3]   CALIBRATION OF ATOMIC-FORCE MICROSCOPE TIPS [J].
HUTTER, JL ;
BECHHOEFER, J .
REVIEW OF SCIENTIFIC INSTRUMENTS, 1993, 64 (07) :1868-1873
[4]   DIRECT MEASUREMENT OF INTERACTION FORCES BETWEEN COLLOIDAL PARTICLES USING THE SCANNING FORCE MICROSCOPE [J].
LI, YQ ;
TAO, NJ ;
PAN, J ;
GARCIA, AA ;
LINDSAY, SM .
LANGMUIR, 1993, 9 (03) :637-641
[5]  
*NAT INSTR, ATMIO16E1 NAT INSTR
[6]   LATERAL, NORMAL, AND LONGITUDINAL SPRING CONSTANTS OF ATOMIC-FORCE MICROSCOPY CANTILEVERS [J].
NEUMEISTER, JM ;
DUCKER, WA .
REVIEW OF SCIENTIFIC INSTRUMENTS, 1994, 65 (08) :2527-2531
[7]   PARALLEL BEAM APPROXIMATION FOR V-SHAPED ATOMIC-FORCE MICROSCOPE CANTILEVERS [J].
SADER, JE .
REVIEW OF SCIENTIFIC INSTRUMENTS, 1995, 66 (09) :4583-4587
[8]   THEORETICAL-ANALYSIS OF THE STATIC DEFLECTION OF PLATES FOR ATOMIC-FORCE MICROSCOPE APPLICATIONS [J].
SADER, JE ;
WHITE, L .
JOURNAL OF APPLIED PHYSICS, 1993, 74 (01) :1-9
[9]   Frequency response of cantilever beams immersed in viscous fluids with applications to the atomic force microscope [J].
Sader, JE .
JOURNAL OF APPLIED PHYSICS, 1998, 84 (01) :64-76
[10]   METHOD FOR THE CALIBRATION OF ATOMIC-FORCE MICROSCOPE CANTILEVERS [J].
SADER, JE ;
LARSON, I ;
MULVANEY, P ;
WHITE, LR .
REVIEW OF SCIENTIFIC INSTRUMENTS, 1995, 66 (07) :3789-3798