Characterization of poly(phenylsilsesquioxane) thin-film planar optical waveguides

被引：11

作者：

Brown, KS ^{[1
]}

Taylor, BJ ^{[1
]}

Hornak, LA ^{[1
]}

Weidman, TW ^{[1
]}

机构：

[1] AT&T BELL LABS,LUCENT TECHNOL,MURRAY HILL,NJ 07974

来源：

IEEE PHOTONICS TECHNOLOGY LETTERS | 1997年 / 9卷 / 06期

基金：

美国国家科学基金会;

关键词：

optical interconnections; optical planar wave-guides; optical polymers; polymer waveguides; poly(phenylsilsesquioxane); siloxane polymers;

D O I：

10.1109/68.584992

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

Characterization results of thin-film poly(phenylsilsesquioxane) (PPSQ) planar-optical waveguides are presented, Results of absorption spectrum, refractive index, thermal stress effect, and waveguide loss measurements performed on 1-2 mu m PPSQ films indicate this silicon backbone polymer to be a strong potential candidate for optical waveguide integration within microelectronic systems. PPSQ films are shown to exhibit thermal stability with respect to volume, refractive index, and optical loss for temperatures up to 400 degrees C. The first TE mode of PPSQ planar optical waveguides between 1.32 and 1.72 mu m in thickness fabricated on 5-mu m HiPOX Si wafers exhibited optical loss of 0.16 dB/cm at 632.8 mm.

引用

页码：791 / 793

页数：3

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