Fluorocarbon polymer thin films prepared by three different types of r.f. magnetron sputtering systems

被引：19

作者：

Iwamori, Satoru ^{[1
]}

Hasegawa, Norihiko ^{[1
]}

Uemura, Akihiro ^{[1
]}

机构：

[1] Kanazawa Univ, Grad Sch Nat Sci & Technol, Kanazawa, Ishikawa 9201192, Japan

来源：

SURFACE & COATINGS TECHNOLOGY | 2008年 / 203卷 / 1-2期

关键词：

Poly(tetrafluoroethylene); Thin film; Magnetic field; Unbalanced magnetron sputtering; Wettability: Surface morphology;

D O I：

10.1016/j.surfcoat.2008.07.035

中图分类号：

TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

Fluorocarbon polymer thin films were deposited with a poly(tetrafluoroethylene) target by three different types of r.f. magnetron sputtering systems with strong, weak and unbalanced magnetic fields. Surface morphologies, chemical structure and contact angles of water droplets of these polymer thin films were studied. Many tiny prominences can be observed at the surface of the polymer thin film deposited by the magnetron sputtering with a strong magnetic field. However, larger prominences can be observed at the surface of the polymer thin film deposited by the magnetron sputtering with a weak magnetic field. Both of these tiny and large prominences can be observed at the surface of the polymer thin film deposited by an unbalanced magnetron sputtering. Five peaks can be separated in C(1s) XPS spectra of these polymer thin films. However peak intensities of these peaks are different. Peak intensity which represents CF2 decreased with increase of the magnetic field. (C) 2008 Elsevier B.V. All rights reserved.

引用

页码：59 / 64

页数：6

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