CO2 Laser irradiation of GeO2 planar waveguide fabricated by rf-sputtering

被引：30

作者：

Chiasera, A. ^{[1
]}

Macchi, C. ^{[2
,3
]}

Mariazzi, S. ^{[4
,5
]}

Valligatla, S. ^{[1
,4
,6
]}

Lunelli, L. ^{[7
,8
]}

Pederzolli, C. ^{[7
]}

Rao, D. N. ^{[6
]}

Somoza, A. ^{[2
,9
]}

Brusa, R. S. ^{[4
,10
]}

Ferrari, M. ^{[1
]}

机构：

[1] CNR IFN CSMFO Lab, I-38123 Povo, Trento, Italy

[2] UNCentro, IFIMAT, Buenos Aires, DF, Argentina

[3] Consejo Nacl Invest Cient & Tecn, RA-1033 Buenos Aires, DF, Argentina

[4] Univ Trento, Dipartimento Fis, I-38123 Povo, Trento, Italy

[5] Ist Nazl Fis Nucl, Grp Collegato Trento, I-38123 Povo, Trento, Italy

[6] Univ Hyderabad, Sch Phys, Hyderabad 500046, Andhra Pradesh, India

[7] Bruno Kessler Fdn, Trento, Italy

[8] CNR, Inst Biophys, Trento, Italy

[9] CICPBA, Buenos Aires, DF, Argentina

[10] Univ Trento, CNISM, I-38123 Trento, Italy

来源：

OPTICAL MATERIALS EXPRESS | 2013年 / 3卷 / 09期

关键词：

OPTICAL-PROPERTIES; GLASS; SCATTERING; QUARTZ; RAMAN; REDUCTION; SPECTRA;

D O I：

10.1364/OME.3.001561

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

GeO2 transparent glass ceramic planar waveguides were fabricated by a RF-sputtering technique and then irradiated by a pulsed CO2 laser. The effects of CO2 laser processing on the optical and structural properties of the waveguides were evaluated by different techniques including m-line, micro-Raman spectroscopy, atomic force microscopy, and positron annihilation spectroscopy. After laser annealing, an increase of the refractive index of approximately 0.04 at 1.5 mu m and a decrease of the attenuation coefficient from 0.9 to 0.5 db/cm at 1.5 mu m was observed. Raman spectroscopy and microscopy results put in evidence that the system embeds GeO2 nanocrystals and their phase varies with the irradiation time. Moreover, positron annihilation spectroscopy was used to study the depth profiling of the as prepared and laser annealed samples. The obtained results yielded information on the structural changes produced after the irradiation process inside the waveguiding films of approximately 1 mu m thickness. In addition, a density value of the amorphous GeO2 samples was evaluated. (c) 2013 Optical Society of America

引用

页码：1561 / 1570

页数：10

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