Apertureless scanning near field optical microscope with sub-10 nm resolution

被引:96
作者
Bek, A [1 ]
Vogelgesang, R [1 ]
Kern, K [1 ]
机构
[1] Max Planck Inst Festkorperforsch, D-70569 Stuttgart, Germany
关键词
D O I
10.1063/1.2190211
中图分类号
TH7 [仪器、仪表];
学科分类号
0804 ; 080401 ; 081102 ;
摘要
We report on the implementation of a versatile dynamic mode apertureless scanning near field optical microscope (aSNOM) for nanoscopic investigations of optical properties at surfaces and interfaces. The newly developed modular aSNOM optomechanical unit is essentially integrable with a multitude of laser sources, homemade scanning probe microscopes (SPMs) as well as commercially available SPMs as demonstrated here. The instrument is especially designed to image opaque surfaces without a restriction to transparent substrates. In the description of the instrument we draw frequent attention to various possible artifact mechanisms, how to overcome them, and we present effective checks to ensure true near field optical contrast. Lateral optical contrast in optical amplitude and phase images below 10 nm is demonstrated. (c) 2006 American Institute of Physics.
引用
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页数:11
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