Approximate expressions for the capacitance and electrostatic potential of interdigitated electrodes

被引：59

作者：

den Otter, MW

机构：

[1] Bloemenhof 3

来源：

SENSORS AND ACTUATORS A-PHYSICAL | 2002年 / 96卷 / 2-3期

关键词：

interdigitated electrode; capacitance; electrostatic potential; surface acoustic wave;

D O I：

10.1016/S0924-4247(01)00783-X

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

Interdigitated electrode systems are widely applied in sensors, photodiodes and surface acoustic wave (SAW) filters. The present paper adds to the body of knowledge on the capacitance and potential distribution of these systems. Approximate equations for the electrostatic potential and the capacitance of the interdigitated electrode system are derived based on the potential function of two conducting semi-infinite plates. The new equations concur with the exact solution of the interdigitated electrode system. Advantages of the new equations are the simple mathematical form and evaluation method. (C) 2002 Elsevier Science B.V. All rights reserved.

引用

页码：140 / 144

页数：5

共 13 条

[1]

[Anonymous], 1981, CENSUS CANADA, V2

[2] Two-dimensional device modeling and analysis of GaInAs metal-semiconductor-metal photodiode structures [J].