Controlled two-dimensional distribution of nanoparticles by spin-coating method

被引:101
作者
Hong, YK
Kim, H
Lee, G
Kim, W
Park, JI
Cheon, J
Koo, JY
机构
[1] Korea Res Inst Stand & Sci, Taejon 305600, South Korea
[2] Korea Adv Inst Sci & Technol, Dept Chem, Taejon 305701, South Korea
[3] Korea Adv Inst Sci & Technol, Sch Mol Sci BK21, Taejon 305701, South Korea
关键词
D O I
10.1063/1.1445811
中图分类号
O59 [应用物理学];
学科分类号
摘要
We demonstrate that the controlled distribution of nanoparticles can be achieved by employing the spin-coating method. The Co and Ag nanoparticles were uniformly distributed on the Si and SiO2 substrates with this method. The particle density was controllable by varying the concentration of colloids. The spatial distribution of the nanoparticles within the patterned area was also shown to be uniform with small boundary effect, which is favorable for current microelectronics technology. We propose that the spin-coating method can be utilized in developing mass production processes for future nanodevices. (C) 2002 American Institute of Physics.
引用
收藏
页码:844 / 846
页数:3
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