Indium tin oxide plasma frequency dependence on sheet resistance and surface adlayers determined by reflectance FTIR spectroscopy

被引：87

作者：

Brewer, SH ^{[1
]}

Franzen, S ^{[1
]}

机构：

[1] N Carolina State Univ, Dept Chem, Raleigh, NC 27695 USA

来源：

JOURNAL OF PHYSICAL CHEMISTRY B | 2002年 / 106卷 / 50期

关键词：

D O I：

10.1021/jp026600x

中图分类号：

O64 [物理化学（理论化学）、化学物理学];

学科分类号：

070304 ; 081704 ;

摘要：

Variable angle reflectance FTIR spectroscopy was used to investigate the optical properties of indium tin oxide (ITO) and fluorine-doped tin oxide (SFO) thin films in the near-IR spectral region. The reflectance data were used to determine the plasma frequency and the electronic scattering time using the Drude free-electron model, the dielectric function of ITO, and the two- and three-phase Fresnel equations for reflection. The reflectance, plasma frequency, and electronic scattering time of ITO thin films were found to be dependent on the sheet resistance. Surface adlayers were also found to affect the reflectance and the position of the plasma frequency of the ITO thin films. The reflectance and observed plasma frequency for the SFO thin films were lower than those for any of the ITO films studied.

引用

页码：12986 / 12992

页数：7

共 45 条

[1] SPONTANEOUSLY ORGANIZED MOLECULAR ASSEMBLIES .1. FORMATION, DYNAMICS, AND PHYSICAL-PROPERTIES OF NORMAL-ALKANOIC ACIDS ADSORBED FROM SOLUTION ON AN OXIDIZED ALUMINUM SURFACE [J].

ALLARA, DL ;

NUZZO, RG .

LANGMUIR, 1985, 1 (01) :45-52

[2] SPONTANEOUSLY ORGANIZED MOLECULAR ASSEMBLIES .2. QUANTITATIVE INFRARED SPECTROSCOPIC DETERMINATION OF EQUILIBRIUM STRUCTURES OF SOLUTION-ADSORBED NORMAL-ALKANOIC ACIDS ON AN OXIDIZED ALUMINUM SURFACE [J].

ALLARA, DL ;

NUZZO, RG .

LANGMUIR, 1985, 1 (01) :52-66

[3] Electrical, optical, and structural properties of tin-doped In2O3-M2O3 solid solutions (M = Y, Sc) [J].

Ambrosini, A ;

Duarte, A ;

Poeppelmeier, KR ;

Lane, M ;

Kannewurf, CR ;

Mason, TO .

JOURNAL OF SOLID STATE CHEMISTRY, 2000, 153 (01) :41-47

[4] Modification of indium tin oxide electrodes with nucleic acids: Detection of attomole quantities of immobilized DNA by electrocatalysis [J].

Armistead, PM ;

Thorp, HH .

ANALYTICAL CHEMISTRY, 2000, 72 (16) :3764-3770

[5] Oxidation kinetics of guanine in DNA molecules adsorbed onto indium tin oxide electrodes [J].

Armistead, PM ;

Thorp, HH .

ANALYTICAL CHEMISTRY, 2001, 73 (03) :558-564

[6] COMPARISON OF SELF-ASSEMBLED MONOLAYERS ON GOLD - COADSORPTION OF THIOLS AND DISULFIDES [J].

BAIN, CD ;

BIEBUYCK, HA ;

WHITESIDES, GM .

LANGMUIR, 1989, 5 (03) :723-727

[7] EFFECTS OF OXYGEN PARTIAL-PRESSURE DURING DEPOSITION ON THE PROPERTIES OF ION-BEAM-SPUTTERED INDIUM-TIN OXIDE THIN-FILMS [J].

BREGMAN, J ;

SHAPIRA, Y ;

AHARONI, H .

JOURNAL OF APPLIED PHYSICS, 1990, 67 (08) :3750-3753

[8] Formation of thiolate and phosphonate adlayers on indium-tin oxide: Optical and electronic characterization [J].

Brewer, SH ;

Brown, DA ;

Franzen, S .

LANGMUIR, 2002, 18 (18) :6857-6865

[9] Optical properties of indium tin oxide and fluorine-doped tin oxide surfaces: correlation of reflectivity, skin depth, and plasmon frequency with conductivity [J].

Brewer, SH ;

Franzen, S .

JOURNAL OF ALLOYS AND COMPOUNDS, 2002, 338 (1-2) :73-79

[10] Surface plasmon resonance imaging measurements of ultrathin organic films [J].

Brockman, JM ;

Nelson, BP ;

Corn, RM .

ANNUAL REVIEW OF PHYSICAL CHEMISTRY, 2000, 51 :41-63

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