Mass spectroscopy of recoiled ions, secondary ion mass spectroscopy, and Auger electron spectroscopy investigation of Y2O3-stabilized ZrO2(100) and (110)

We have studied the (100) and (110) surfaces of yttria-stabilized cubic ZrO2 using Auger electron spectroscopy, low energy electron diffraction (LEED), direct recoil spectroscopy, mass spectroscopy of recoiled ions (MSRI), and secondary ion mass spectroscopy (SIMS). The concentration of yttrium at the surface was weakly influenced by the surface structure under the experimental conditions investigated. Both MSRI and SIMS indicated a more enhanced yttrium signal than zirconium signal at the surface compared to the respective bulk concentrations. The surfaces were not very well ordered as indicated by LEED. The yttria-stabilized cubic ZrO2 single crystal surfaces may not be a suitable model material for pure phase ZrO2 surfaces due to significant yttria concentrations at the surface. (C) 1999 American Vacuum Society. [S0734-2101(99)02603-2].