High throughput physical vapour deposition and dielectric and ferroelectric screening of (Bi,Na)TiO3 thin-film libraries

被引：12

作者：

Darby, Mark S. B. ^{[1
]}

Guerin, Samuel ^{[1
]}

Hayden, Brian E. ^{[1
,2
]}

Schreiner, Hans-Juergen ^{[3
]}

Yakovlev, Sergey ^{[1
]}

机构：

[1] Ilika Technol Ltd, Southampton SO16 7NS, Hants, England

[2] Univ Southampton, Dept Chem, Southampton SO17 1BJ, Hants, England

[3] CeramTec GmbH, Geschaftsbereich Multifunkt Keram, D-91207 Lauf, Germany

来源：

JOURNAL OF APPLIED PHYSICS | 2013年 / 113卷 / 01期

关键词：

ELECTRICAL-PROPERTIES; COMBINATORIAL;

D O I：

10.1063/1.4773101

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

Polycrystalline thin-film libraries of Bi2O3-TiO2-Na2O system have been synthesised over a wide composition region using elemental molecular beam epitaxy sources combined with an oxygen plasma source. Structural characterisation and the screening of both dielectric and ferroelectric properties of fabricated compounds have been carried out. The bismuth sodium titanate perovskite-type phases exhibited a high relative permittivity (up to 375), a loss tangent lower than 0.02 and ferroelectric properties superior to thin films synthesised using other deposition methods: a remnant polarization, P-r, approximately 22 mu C/cm(2) was observed in the optimal composition range. The high throughput approach allowed us to establish clearly the compositional boundaries of the ferroelectric perovskite phase in the system. (C) 2013 American Institute of Physics. [http://dx.doi.org/10.1063/1.4773101]

引用

页数：5

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