Preparation and crystallographic characterizations of highly oriented Pb(Zr0.52Ti0.48)O-3 films and MgO buffer layers on (100)GaAs and (100)Si by pulsed laser ablation

被引：37

作者：

Masuda, A ^{[1
]}

Yamanaka, Y ^{[1
]}

Tazoe, M ^{[1
]}

Nakamura, T ^{[1
]}

Morimoto, A ^{[1
]}

Shimizu, T ^{[1
]}

机构：

[1] MURATA MFG CO LTD,KYOTO 617,JAPAN

来源：

JOURNAL OF CRYSTAL GROWTH | 1996年 / 158卷 / 1-2期

关键词：

D O I：

10.1016/0022-0248(95)00317-7

中图分类号：

O7 [晶体学];

学科分类号：

0702 ; 070205 ; 0703 ; 080501 ;

摘要：

Lead-zirconate-titanate (Pb(Zr0.52Ti0.48)O-3: PZT) thin films were prepared on both (100)GaAs and (100)Si substrates with MgO buffer layers. Both of the PZT films and MgO buffer layers were deposited by pulsed laser ablation (PLA) using an ArF excimer laser. [100]-oriented perovskite PZT films with [100]-oriented MgO buffer layers were obtained on both substrates. The microstructures of MgO buffer layers and PZT films were evaluated using a scanning electron microscope (SEM). This preparation technique offers promise of integrating ferroelectric and semiconductor devices.

引用

页码：84 / 88

页数：5

共 18 条

[1]

[Anonymous], AM I PHYS C P

[2] EPITAXIAL MGO ON SI(001) FOR Y-BA-CU-O THIN-FILM GROWTH BY PULSED LASER DEPOSITION [J].

FORK, DK ;

PONCE, FA ;

TRAMONTANA, JC ;

GEBALLE, TH .

APPLIED PHYSICS LETTERS, 1991, 58 (20) :2294-2296

[3] EPITAXIAL MGO ON GAAS(111) AS A BUFFER LAYER FOR Z-CUT EPITAXIAL LITHIUM-NIOBATE [J].

FORK, DK ;

ANDERSON, GB .

APPLIED PHYSICS LETTERS, 1993, 63 (08) :1029-1031

[4]

FORK DK, 1993, MATER RES SOC SYMP P, V285, P355

[5]

FORK DK, 1993, MATER RES SOC S P, V310, P113

[6] FORMATION OF METAL/FERROELECTRIC/INSULATOR/SEMICONDUCTOR STRUCTURE WITH A CEO2 BUFFER LAYER [J].

HIRAI, T ;

TERAMOTO, K ;

NISHI, T ;

GOTO, T ;

TARUI, Y .

JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 1994, 33 (9B) :5219-5222

[7] MGO EPITAXIAL THIN-FILMS ON (100) GAAS AS A SUBSTRATE FOR THE GROWTH OF ORIENTED PBTIO3 [J].

HSU, WY ;

RAJ, R .

APPLIED PHYSICS LETTERS, 1992, 60 (25) :3105-3107

[8] FERROELECTRIC PROPERTIES OF LEAD-ZIRCONATE-TITANATE FILMS PREPARED BY LASER ABLATION [J].

KIDOH, H ;

OGAWA, T ;

MORIMOTO, A ;

SHIMIZU, T .

APPLIED PHYSICS LETTERS, 1991, 58 (25) :2910-2912

[9] SYNTHESIS OF FERROMAGNETIC BISUBSTITUTED YTTRIUM-IRON-GARNET FILMS BY LASER ABLATION [J].

KIDOH, H ;

MORIMOTO, A ;

SHIMIZU, T .

APPLIED PHYSICS LETTERS, 1991, 59 (02) :237-239

[10]

MASUDA A, 1994, 1994 INT C SOL STAT, P193

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