The structure characteristics and piezo-resistance effect in hydrogenated nanocrystalline silicon films

被引：11

作者：

He, YL ^{[1
]}

Liu, H ^{[1
]}

Yu, MB ^{[1
]}

Yu, XM ^{[1
]}

机构：

[1] NORMAL INST RAILWAY,DEPT PHYS,SHUZHOU 215009,PEOPLES R CHINA

来源：

NANOSTRUCTURED MATERIALS | 1996年 / 7卷 / 07期

关键词：

D O I：

10.1016/S0965-9773(96)00052-9

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

In this paper, we successfully applied the PECVD method to deposit nanocrystalline silicon films (nc - Si: H) and determined the microstructure with HREM and STM technology. The nc - Si: H films consist of a large number of micrograins and interfaces. For this man-made film material with special structure, we studied the piezo- resistance effect and hydrogen content, which varied with the microstructure of the films. We suggest that the unique structure of nc - Si:H films is the main cause of larger piezo- resistance effect and higher hydrogen content in the films.

引用

页码：769 / 777

页数：9

共 14 条

[1] MICROSTRUCTURE OF NANOSIZE HYDROGENATED CRYSTALLINE SILICON STUDIED BY SCANNING-TUNNELING-MICROSCOPY [J].

BAI, CL ;

WANG, ZH ;

DAI, CC ;

ZHANG, PC ;

HE, YL .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1994, 12 (03) :1823-1826

[2]

CARLSON DE, 1984, PHYSIS HYDROGENATED, V1, P27

[3] THE STRUCTURE AND PROPERTIES OF NANOSIZE CRYSTALLINE SILICON FILMS [J].

HE, YL ;

YIN, CZ ;

CHENG, GX ;

WANG, LC ;

LIU, XN ;

HU, GY .

JOURNAL OF APPLIED PHYSICS, 1994, 75 (02) :797-803

[4]

HE YL, 1993, SCI CHINA SER A, V36, P248

[5] MICROSTRUCTURE AND ELECTRON CONDUCTION MECHANISM OF HYDROGENATED NANO-CRYSTALLINE SILICON FILMS [J].

HE, YL ;

CHU, YM ;

LIN, HY ;

JIANG, SS .

CHINESE PHYSICS LETTERS, 1993, 10 (09) :539-542

[6]

HE YL, 1993, MAT RES S C, V283, P537

[7]

HE YL, 1993, P IUMRSICA WUH, P317

[8]

HE YL, IN PRESS J APPL PHYS

[9]

HE YL, 1996, J MATER RES, V10, P33

[10] ELECTRONIC CONDUCTIVITY OF HYDROGENATED NANOCRYSTALLINE SILICON FILMS [J].

HU, GY ;

OCONNELL, RF ;

HE, YL ;

YU, MB .

JOURNAL OF APPLIED PHYSICS, 1995, 78 (06) :3945-3948

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