A high performance Doppler interferometer for advanced optical storage systems

被引:47
作者
Lee, CK
Wu, GY
Teng, CT
Wu, WJ
Lin, CT
Hsiao, WH
Shih, HC
Wang, JS
Lin, SC
Lin, CC
Lee, CF
Lin, YC
机构
[1] Natl Taiwan Univ, Inst Appl Mech, Taipei 106, Taiwan
[2] AHEAD Optoelect Inc, Taipei 235, Taiwan
来源
JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS | 1999年 / 38卷 / 3B期
关键词
Doppler effect; interferomter; vibrometer; optical storage; flying height measurement; flying height modulation; near-field optical recording;
D O I
10.1143/JJAP.38.1730
中图分类号
O59 [应用物理学];
学科分类号
摘要
The design thinking implementation, and testing results of a newly developed Doppler interferometer is described. The three built-in measuring modes including (1) single-beam mode for measuring absolute vibration. (2) dual-beam for measuring differential vibration, and (3) distance measuring, are all presented. To facilitate the application of this interferometer for advanced optical storage applications, a circular polarization interferometer configuration was adopted to arrive at a compact size and to enable the adoption of a built-in microscopic imaging system that can be used both as an alignment aid and as a sample imaging system. The configuration of the inherent dynamic system analysis capabilities that can be used to investigate the Bode plot of optical storage systems is also examined in detail. The nanometer resolution and megahertz bandwidth capabilities of this interferometer were verified in various advanced optical storage systems related experiments.
引用
收藏
页码:1730 / 1741
页数:12
相关论文
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