Optical resonance modes in InGaN/GaN multiple-quantum-well microring cavities

被引：49

作者：

Zeng, KC ^{[1
]}

Dai, L ^{[1
]}

Lin, JY ^{[1
]}

Jiang, HX ^{[1
]}

机构：

[1] Kansas State Univ, Dept Phys, Manhattan, KS 66506 USA

来源：

APPLIED PHYSICS LETTERS | 1999年 / 75卷 / 17期

关键词：

D O I：

10.1063/1.125078

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

Microrings of varying sizes have been fabricated from InxGa1-xN/GaN (x similar to 0.15) multiple quantum wells (MQWs). Photolithography and dry etching techniques including both ion-beam and inductively coupled plasma etching were employed to pattern the III-nitride MQW microrings. Individual microrings were optically pumped and optical resonance modes were observed. The observed mode spacings were consistent with those expected for whispering-gallery (WG) modes within a resonant cavity of cylindrical symmetry, refractive index, and dimensions of the rings under investigation. The results obtained from the microring cavities were compared with those of the III-nitride MQW microdisk cavities. Our results have indicated that resonance modes corresponding to the radial and the WG modes are simultaneously present in microdisk cavities, but only WG modes are available from the microring cavities. Implications of our results on future GaN-based microcavity light emitters have been discussed. (C) 1999 American Institute of Physics. [S0003-6951(99)04743-9].

引用

页码：2563 / 2565

页数：3

共 15 条

[1] GaN hexagonal microprisms with smooth vertical facets fabricated by selective metalorganic vapor phase epitaxy [J].