Nanoscopic investigations of diamond properties by scanning probe microscopy techniques

被引:6
作者
Cramer, RM [1 ]
Heiderhoff, R [1 ]
Balk, LJ [1 ]
机构
[1] Berg Univ Wuppertal, Fachbereich Elektrotech, Fachgebiet Elekt, D-42097 Wuppertal, Germany
关键词
atomic force microscopy; diamond; scanning electron microscopy;
D O I
10.1016/S0925-9635(99)00050-3
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
In order to improve the quality of artificially produced diamond, a thorough analysis of the realised specimens is mandatory. Recognition of defects and their subsequent characterisation has to be carried out on a nanoscopic level to ensure that even smallest structures with modified material properties can be evaluated. Especially thermal/mechanical, optical/opto-electronic, as well as electrical/electronic properties have to be characterised, since these properties are responsible for the significance of diamond for a vast variety of applications. In this work we would like to present the efficiency of scanning thermal microscopy and scanning near-field acoustical microscopy to determine the thermal conductivity as well as the mechanical properties with a resolution in the nanometre scale. To determine electrical/electronic properties of chemical vapour deposition (CVD) diamond, a scanning force and scanning electron microscope (SEM) hybrid system was used. Finally, cathodoluminescence investigations as a well established and nondestructive method for analysing impurities and defects in natural and CVD diamond were carried out in a scanning near-field optical microscope/SEM hybrid system. Using these techniques, nanoscopic distributions of defects within small diamond grains became visible without any sample preparation. (C) 1999 Elsevier Science S.A. All rights reserved.
引用
收藏
页码:1581 / 1586
页数:6
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