Investigation of Pt/Ti bilayer on SiNx/Si substrates for thermal sensor applications

被引：12

作者：

Giani, A ^{[1
]}

Mailly, F ^{[1
]}

Pascal-Delannoy, F ^{[1
]}

Foucaran, A ^{[1
]}

Boyer, A ^{[1
]}

机构：

[1] Univ Montpellier 2, Ctr Elect & Microoptelect Montpellier, UMR CNRS 5507, F-34095 Montpellier, France

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS | 2002年 / 20卷 / 01期

关键词：

D O I：

10.1116/1.1424272

中图分类号：

TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

Pt/Ti thin films on SiNx/Si substrates have been investigated for thermal sensor applications on SiNx membrane. Therefore, Pt/Ti adhesion during KOH etching of silicon and high temperature coefficient of resistance (TCR) are the principal aims of this study, ac sputtering and electron beam evaporation have been investigated for metal deposition. Vacuum annealing is used to improve the Pt/Ti characteristics. Stress characterizations and adhesion strength are evaluated by an x-ray diffraction pattern and adhesive tape test, respectively. TCR and resistivity were finally measured to confirm the compatibility with good thermal sensor sensitivity. Pt/Ti films elaborated by electron beam evaporation and vacuum annealed present the best characteristics for thermal sensor applications: good adhesion is obtained even after 5 h in KOH etching solution, electrical resistivity is about 15 uOmega cm and TCR is 3.3x10(-3)/degreesC. Finally, by using these platinum thin films, a thermal accelerometer has been manufactured and tilt measurements have been achieved. (C) 2002 American Vacuum Society.

引用

页码：112 / 116

页数：5

共 14 条

[1] A silicon flow sensor for gases and liquids using AC measurements [J].

Bedö, G ;

Fannasch, H ;

Müller, R .

SENSORS AND ACTUATORS A-PHYSICAL, 2000, 85 (1-3) :124-132

[2] Wide range semiconductor flow sensors [J].

Glaninger, A ;

Jachimowicz, A ;

Kohl, F ;

Chabicovsky, R ;

Urban, G .

SENSORS AND ACTUATORS A-PHYSICAL, 2000, 85 (1-3) :139-146

[3] The development and application of microthermal sensors with a mesh-membrane supporting structure [J].

Hung, ST ;

Wong, SC ;

Fang, WL .

SENSORS AND ACTUATORS A-PHYSICAL, 2000, 84 (1-2) :70-75

[4] Pt/Ti thin film adhesion on SiNx/Si substrates [J].

Kang, U ;

Lee, T ;

Kim, YH .

JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS BRIEF COMMUNICATIONS & REVIEW PAPERS, 1999, 38 (7A) :4147-4151

[5] Investigation of Pt/Ti bottom electrodes for Pb(Zr,Ti)O-3 films [J].

Kim, ST ;

Kim, HH ;

Lee, MY ;

Lee, WJ .

JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 1997, 36 (1A) :294-300

[6] Agglomeration phenomena of high temperature coefficient resistance platinum films deposited by electron beam evaporation [J].

Lee, JS ;

Park, HD ;

Shin, SM ;

Park, JW .

JOURNAL OF MATERIALS SCIENCE LETTERS, 1997, 16 (15) :1257-1259

[7]

LEUNG AM, 1997, MICROMACHINED ACCELE

[8] Anemometer with hot platinum thin film [J].

Mailly, F ;

Giani, A ;

Bonnot, R ;

Temple-Boyer, P ;

Pascal-Delannoy, F ;

Foucaran, A ;

Boyer, A .

SENSORS AND ACTUATORS A-PHYSICAL, 2001, 94 (1-2) :32-38

[9]

Milanovi V., 1998, INT MECH ENG C EXP M

[10] Micromachined convective accelerometers in standard integrated circuits technology [J].

Milanovic, V ;

Bowen, E ;

Zaghloul, ME ;

Tea, NH ;

Suehle, JS ;

Payne, B ;

Gaitan, M .

APPLIED PHYSICS LETTERS, 2000, 76 (04) :508-510

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