Detection of Toxic Gases by a Tin Oxide Multisensor

被引：19

作者：

Sayago, Isabel ^{[1
]}

del Carmen Horrillo, Maria ^{[1
]}

Baluk, Sonia ^{[2
]}

Aleixandre, Manuel ^{[1
]}

Jesus Fernandez, Maria ^{[1
]}

Ares, Luis ^{[1
]}

Garcia, Maria ^{[1
]}

Pedro Santos, Jose ^{[1
]}

Gutierrez, Javier ^{[1
]}

机构：

[1] CSIC, IFA, Lab Sensores, Madrid, Spain

[2] Inst Nacl Tecnol Ind CITEI, San Martin, Buenos Aires, Argentina

来源：

IEEE SENSORS JOURNAL | 2002年 / 2卷 / 05期

关键词：

Atmospheric pollution; multisensor;

D O I：

10.1109/JSEN.2002.806215

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

A tin oxide multisensor with eight sensor elements has been utilized to detect different gases that are emitted from the chemical industry. The different sensors have been prepared using the RF reactive sputtering technique. Some components of this multisensor were doped with Pt and Cr by sputtering. Each sensor has been characterized by electrical measurements for detection of atmospheric pollution (nitrogen dioxide, carbon monoxide, toluene, and propanal). The detected gases are toxic and their extreme concentrations recommended in air oscillate from 1 ppm to hundreds of ppm. Detections were carried out with a single gas or a gas mixture (two gases) in dry air at 250 degrees C. The sensitivity and selectivity to these gases were studied. Back-propagation neural networks and their classification results were discussed.

引用

页码：387 / 393

页数：7

共 19 条

[1]

Chang S., 1979, SURF SCI, V86, P335

[2] SELECTIVITY STUDIES AND OXYGEN DEPENDENCE OF TIN(IV) OXIDE-BASED GAS SENSORS [J].