Diffraction gratings in sol-gel films by direct contact printing using a UV-mercury lamp

被引：53

作者：

Äyräs, P ^{[1
]}

Rantala, JT ^{[1
]}

Honkanen, S ^{[1
]}

Mendes, SB ^{[1
]}

Peyghambarian, N ^{[1
]}

机构：

[1] Univ Arizona, Ctr Opt Sci, Tucson, AZ 85721 USA

来源：

OPTICS COMMUNICATIONS | 1999年 / 162卷 / 4-6期

关键词：

integrated optics; diffraction grating; sol-gel; UV-lithography; photolithography;

D O I：

10.1016/S0030-4018(99)00108-X

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

We report on the fabrication of diffraction gratings in photosensitive sol-gel thin films by direct contact printing using a UV-mercury lamp. Titanium amplitude masks were used to replicate diffraction gratings into photosensitive sol-gel films by contact printing with an incoherent UV-light source. Gratings with 1-mu m period were fabricated in sol-gel films. The diffraction efficiencies of each diffracted order were measured and compared to theoretical values. The demonstrated process of contact printing using a regular UV-light source in the optically compatible sol-gel material has potential for large-scale fabrication of submicrometer gratings at very low cost. (C) 1999 Elsevier Science B.V. All rights reserved.

引用

页码：215 / 218

页数：4

共 11 条

[1]

ANDREWS MP, 1997, CRITICAL REV OPTICAL, V68

[2]

[Anonymous], 1985, OPTICAL INTEGRATED C

[3] BRAGG GRATINGS FABRICATED IN MONOMODE PHOTOSENSITIVE OPTICAL FIBER BY UV EXPOSURE THROUGH A PHASE MASK [J].