Temperature controlled microstage for an atomic force microscope

被引：41

作者：

Musevic, I

Slak, G

Blinc, R

机构：

[1] J. Stefan Institute, 61 000 Ljubljana

来源：

REVIEW OF SCIENTIFIC INSTRUMENTS | 1996年 / 67卷 / 07期

关键词：

D O I：

10.1063/1.1147212

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

A temperature controlled microstage has been developed for an atomic force microscope (AFM). The stage is based on a small, temperature regulated heater, which is attached to the piezo-scanner of the AFM. The operating performances of the AFM have been tested in air at elevated temperatures. It was found that atomic resolution can routinely be achieved up to 80 degrees C, whereas beyond this temperature, the onset of thermal instabilities of the AFM cantilever was observed. (C) 1996 American Institute of Physics.

引用

页码：2554 / 2556

页数：3