Comparison of optical and electrical characteristics of SnO2-based thin films deposited by pyrosol from different tin precursors

被引：25

作者：

Dien, E ^{[1
]}

Laurent, JM ^{[1
]}

Smith, A ^{[1
]}

机构：

[1] Ecole Natl Super Ceram Ind, F-87065 Limoges, France

来源：

JOURNAL OF THE EUROPEAN CERAMIC SOCIETY | 1999年 / 19卷 / 6-7期

关键词：

pyrosol; films; electrical properties; optical properties;

D O I：

10.1016/S0955-2219(98)00313-6

中图分类号：

TQ174 [陶瓷工业]; TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

Tin dioxide-based thin films have regained interest recently for applications where low sheet resistance (<10 Ohm/square) and/or high transmission of the visible light (>80-90%) are requested. In this work we have explored the deposition of SnO2 films by pyrosol, which is a CVD type process operating at atmospheric pressure. Results concern the compared optical and electrical characteristics of films deposited by three different precursors. (C) 1999 Elsevier Science Limited. All rights reserved.

引用

页码：787 / 789

页数：3

共 4 条

[1] Morphology and physical properties of SnO2-based thin films deposited by the pyrosol process from dibutyltindiacetate [J].