Micromirrors and microlenses fabricated on polymer materials by means of infrared radiation

被引：16

作者：

Calixto, S

Padilla, GP

机构：

[1] Centro de Investigaciones en Optica, C.P. Leon, 37000, Apartado Postal 1-948, GTO. C.P

来源：

APPLIED OPTICS | 1996年 / 35卷 / 31期

关键词：

micro-optics; microlenses; micromirrors; infrared;

D O I：

10.1364/AO.35.006126

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

A simple method for fabricating micromirrors and microlenses on polymer substrates is presented. Microelements with diameters of approximately several hundred micrometers and f numbers ranging from 3 to 11 have been produced. (C) 1996 Optical Society of America

引用

页码：6126 / 6130

页数：5

共 14 条

[1] MICROLENS ARRAYS PRODUCED BY A PHOTOLYTIC TECHNIQUE [J].

BORRELLI, NF ;

MORSE, DL .

APPLIED OPTICS, 1988, 27 (03) :476-479

[2]

CALIXTO S, 1990, P SOC PHOTO-OPT INS, V1213, P32, DOI 10.1117/12.18008

[3]

COX WR, 1995, P SOC PHOTO-OPT INS, V2383, P110, DOI 10.1117/12.209012

[4] MICROLENSES FABRICATED BY MELTING A PHOTORESIST ON A BASE LAYER [J].

HASELBECK, S ;

SCHREIBER, H ;

SCHWIDER, J ;

STREIBL, N .

OPTICAL ENGINEERING, 1993, 32 (06) :1322-1324

[5]

JAY TR, 1994, OPT ENG, V33, P3552, DOI 10.1117/12.179887

[6] CHEMICALLY ETCHED MICRO-MIRRORS IN SILICON [J].

KENDALL, DL ;

DEGUEL, GR ;

GUELSANDOVAL, S ;

GARCIA, EJ ;

ALLEN, TA .

APPLIED PHYSICS LETTERS, 1988, 52 (10) :836-837

[7] MICROMIRROR ARRAYS USING KOH-H2O MICROMACHINING OF SILICON FOR LENS TEMPLATES, GEODESIC LENSES, AND OTHER APPLICATIONS [J].

KENDALL, DL ;

EATON, WP ;

MANGINELL, R ;

DIGGES, TG .

OPTICAL ENGINEERING, 1994, 33 (11) :3578-3588

[8]

Malacara D., 1992, Optical Shop Testing

[9] PHOTOREFRACTIVE BEAM-STEERING SYSTEM THAT USES ENERGY-TRANSFER IN A BATIO3 CRYSTAL FOR A FIBER-ARRAY INTERCONNECT [J].

MATHEY, P ;

MERCIER, R ;

PAULIAT, G ;

ROOSEN, G ;

GRAVEY, P .

APPLIED OPTICS, 1995, 34 (35) :8220-8229

[10]

MOTAMADI ME, 1995, P SPIE, V2383

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