Microstructure and strength of Al-sapphire interface by means of the surface activated bonding method

被引:21
作者
Akatsu, T
Sasaki, G
Hosoda, N
Suga, T
机构
[1] Res. Ctr. for Adv. Sci. and Technol., University of Tokyo, Tokyo
[2] Department of Engineering, Hiroshima University, Hiroshima
关键词
D O I
10.1557/JMR.1997.0124
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
Sapphire (alpha-Al2O3) and Al were joined by means of the surface activated bonding (SAB) method in an ultrahigh vacuum at room temperature. Tensile tests have shown that failure occurred not along the interface but inside the Al bulk near the interface. High resolution transmission electron microscopy has revealed the formation of a direct interface between Al and sapphire, indicating the possibility to artificially fabricate an atomically direct interface of dissimilar materials at room temperature. However, an intermediate layer was partially observed, which might be attributed to the effect of fast atom beam irradiation of the sapphire surface.
引用
收藏
页码:852 / 856
页数:5
相关论文
共 7 条
[1]   HREM AND DIFFRACTION STUDIES OF AN AL2O3/NB INTERFACE [J].
FLORJANCIC, M ;
MADER, W ;
RUHLE, M ;
TURWITT, M .
JOURNAL DE PHYSIQUE, 1985, 46 (NC-4) :129-133
[2]   THE NIOBIUM SAPPHIRE INTERFACE - STRUCTURAL STUDIES BY HREM [J].
GUTEKUNST, G ;
MAYER, J ;
RUHLE, M .
SCRIPTA METALLURGICA ET MATERIALIA, 1994, 31 (08) :1097-1102
[3]   ON THE ATOMIC-STRUCTURE OF THE NB/AL2O3 INTERFACE AND THE GROWTH OF AL2O3 PARTICLES [J].
KUWABARA, M ;
SPENCE, JCH ;
RUHLE, M .
JOURNAL OF MATERIALS RESEARCH, 1989, 4 (04) :972-977
[4]  
MAYER J, 1989, I PHYS C SER, V98, P349
[5]   ELECTRONIC-STRUCTURE AND CHEMICAL-REACTIONS AT METAL ALUMINA AND METAL ALUMINUM NITRIDE INTERFACES [J].
OHUCHI, FS ;
KOHYAMA, M .
JOURNAL OF THE AMERICAN CERAMIC SOCIETY, 1991, 74 (06) :1163-1187
[6]   STRUCTURE OF AL-AL AND AL-SI3N4 INTERFACES BONDED AT ROOM-TEMPERATURE BY MEANS OF THE SURFACE ACTIVATION METHOD [J].
SUGA, T ;
TAKAHASHI, Y ;
TAKAGI, H ;
GIBBESCH, B ;
ELSSNER, G .
ACTA METALLURGICA ET MATERIALIA, 1992, 40 (SUPPL) :S133-S137
[7]  
SUGA T, 1990, B JPN I MET, V29, P944