Correlation between structural, optical and electrical properties of mu c-Si films

被引：18

作者：

Krankenhagen, R

Schmidt, M

Grebner, S

Poschenrieder, M

Henrion, W

Sieber, I

Koynov, S

Schwarz, R

机构：

[1] HAHN MEITNER INST BERLIN GMBH, D-12489 BERLIN, GERMANY

[2] TECH UNIV MUNICH, DEPT AMG E16, D-85747 GARCHING, GERMANY

来源：

JOURNAL OF NON-CRYSTALLINE SOLIDS | 1996年 / 198卷

关键词：

D O I：

10.1016/0022-3093(96)00085-3

中图分类号：

TQ174 [陶瓷工业]; TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

A series of microcrystalline silicon films (mu c-Si:H) containing different crystalline volume parts was investigated, The optical absorption of one film was studied in detail and its spectrum has been simulated as superposition of a crystalline (c-Si) and an amorphous phase (a-Si) corrected by a scattering coefficient. The carrier transport along the crystallites is discussed.

引用

收藏

页码：923 / 926

页数：4

相关论文

共 12 条

[1] PHOTOACOUSTIC-SPECTROSCOPY AND CHARGE TRANSPORT OF A-SI-H PREPARED BY ION-BEAM DEPOSITION [J].

CEASAR, GP ;

OKUMURA, K ;

LIN, J ;

MACHONKIN, MA ;

DUDEK, L .

JOURNAL OF NON-CRYSTALLINE SOLIDS, 1983, 59-6 (DEC) :289-292

[2] THE STRUCTURE AND PROPERTIES OF NANOSIZE CRYSTALLINE SILICON FILMS [J].

HE, YL ;

YIN, CZ ;

CHENG, GX ;

WANG, LC ;

LIU, XN ;

HU, GY .

JOURNAL OF APPLIED PHYSICS, 1994, 75 (02) :797-803

[3] OPTICAL-ABSORPTION IN HYDROGENATED MICROCRYSTALLINE SILICON [J].

IQBAL, Z ;

SAROTT, FA ;

VEPREK, S .

JOURNAL OF PHYSICS C-SOLID STATE PHYSICS, 1983, 16 (10) :2005-2015

[4] CLOSED-CHAMBER CHEMICAL-VAPOR-DEPOSITION - NEW CYCLIC METHOD FOR PREPARATION OF MICROCRYSTALLINE SILICON FILMS [J].

KOYNOV, S ;

SCHWARZ, R ;

FISCHER, T ;

GREBNER, S ;

MUNDER, H .

JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS BRIEF COMMUNICATIONS & REVIEW PAPERS, 1994, 33 (08) :4534-4539

[5] Initial stages of microcrystalline silicon film growth [J].

Koynov, S ;

Grebner, S ;

Radojkovic, P ;

Hartmann, E ;

Schwarz, R ;

Vasilev, L ;

Krankenhagen, R ;

Sieber, I ;

Henrion, W ;

Schmidt, M .

JOURNAL OF NON-CRYSTALLINE SOLIDS, 1996, 198 :1012-1016

[6]

KRANKENHAGEN R, 1996, SOLID STATE PHENOM, V47, P607

[7]

Lee S., 1991, APPL PHYS LETT, V59, P1579

[8] COMPLETE MICROCRYSTALLINE P-I-N SOLAR-CELL - CRYSTALLINE OR AMORPHOUS CELL BEHAVIOR [J].

MEIER, J ;

FLUCKIGER, R ;

KEPPNER, H ;

SHAH, A .

APPLIED PHYSICS LETTERS, 1994, 65 (07) :860-862

[9]

NEITZERT HC, 1994, P 12 EC PHOT EN C AM, P982

[10] OPTICAL-PROPERTIES AND TRANSPORT IN MICROCRYSTALLINE SILICON PREPARED AT TEMPERATURES BELOW 400-DEGREES-C [J].

RICHTER, H ;

LEY, L .

JOURNAL OF APPLIED PHYSICS, 1981, 52 (12) :7281-7286