Improving an electret transducer by fully utilizing the implanted charge

被引:20
作者
Okamoto, Hiroshi [1 ]
Onuki, Teppei [1 ]
Kuwano, Hiroki [1 ]
机构
[1] Tohoku Univ, Dept Nanomech, Sendai, Miyagi 9808579, Japan
关键词
D O I
10.1063/1.2985899
中图分类号
O59 [应用物理学];
学科分类号
摘要
Most of the countercharge in the conventional electret-based electromechanical transducer, where the electret is formed on a conducting or semiconducting substrate, is induced in the substrate. Here we introduce a type of electret transducer that contains a freestanding electret without a conducting substrate, thereby enhancing the electric field between the electret and the electrodes where the output current is generated. A measurement of the power output from an electromechanical transducer yielded approximately five times larger power when a freestanding electret film was used than when the same electret material was deposited on a conducting substrate. (C) 2008 American Institute of Physics.
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页数:3
相关论文
共 15 条
[1]
Boland J, 2003, PROC IEEE MICR ELECT, P538
[2]
On the permanent electret [J].
Eguchi, M .
PHILOSOPHICAL MAGAZINE, 1925, 49 (289) :178-192
[3]
Corona charging of polymers: Recent advances on constant current charging [J].
Giacometti, JA ;
Fedosov, S ;
Costa, MM .
BRAZILIAN JOURNAL OF PHYSICS, 1999, 29 (02) :269-279
[4]
Goel M, 2003, CURR SCI INDIA, V85, P443
[5]
MEMS power generator with transverse mode thin film PZT [J].
Jeon, YB ;
Sood, R ;
Jeong, JH ;
Kim, SG .
SENSORS AND ACTUATORS A-PHYSICAL, 2005, 122 (01) :16-22
[6]
Kansal A, 2003, ISLPED'03: PROCEEDINGS OF THE 2003 INTERNATIONAL SYMPOSIUM ON LOW POWER ELECTRONICS AND DESIGN, P481
[7]
Lo HW, 2008, PROC IEEE MICR ELECT, P984
[8]
LOEHNDORF M, 2007, POWERMEMS UNPUB, P331
[9]
SAKANE Y, 2007, POWER MEMS, P53
[10]
Sessler GM, 1962, U.S. Patent No., Patent No. [3,118,022, 3118022]