High-frequency high-Q micro-mechanical resonators in thick epipoly technology with post-process gap adjustment

被引：10

作者：

Galayko, D ^{[1
]}

Kaiser, A ^{[1
]}

Legrand, B ^{[1
]}

Collard, D ^{[1
]}

Buchaillot, L ^{[1
]}

Combi, C ^{[1
]}

机构：

[1] CNRS, UMR, IEMN ISEN, F-8520 Lille, France

来源：

FIFTEENTH IEEE INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS, TECHNICAL DIGEST | 2002年

关键词：

D O I：

10.1109/MEMSYS.2002.984358

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

This paper presents high-Q high-frequency lateral-mode clamped-clamped beam micro-resonators driven by parallel-plate electrostafic transducers fabricated in a thick epipoly michromachining, technology. An innovative approach is employed to reduce an intrinsically high transducer gap value of more then 3.0 mum (determined by the need of 15 mum thickness structural layer etching) down to 0.2-0.4 mum after the fabrication. This is achieved by employing an electrostatic motor that approaches actuating and sensing electrodes close to the resonator. The electrode motor is driven with 30 V DC voltage, without any DC currrent consumption. Two resonators having a resonance frequency of 10 MHz have been fabricated with gap values of respectively 0.2 and 0.4 mum. A comparative analysis of performances of the two resonators is given in the paper.

引用

页码：665 / 668

页数：4