Development of humidity standard in trace-moisture region: Characteristics of humidity generation of diffusion tube humidity generator

被引：32

作者：

Abe, H ^{[1
]}

Kitano, H ^{[1
]}

机构：

[1] Natl Inst Adv Ind Sci & Technol, AIST, NMIJ, Tsukuba, Ibaraki 3058563, Japan

来源：

SENSORS AND ACTUATORS A-PHYSICAL | 2006年 / 128卷 / 01期

关键词：

humidity standard; diffusion tube; trace-moisture; sensor calibration;

D O I：

10.1016/j.sna.2005.12.049

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

The characteristics of humidity generation of a diffusion tube humidity generator (DTG) have been studied by the real-time mass measurement of evaporating water using a magnetic suspension balance and by humidity measurement using a moisture analyzer based on cavity ring-down spectroscopy in the amount-of-substance fraction range of water between 20 nmol/mol and 600 nmol/mol. The observed mass-change rates of a diffusion cell due to water evaporation agree well with the evaporation rates calculated on the basis of Fick's law of diffusion. The stable generation of trace-moisture in nitrogen gas is realized by precisely controlling temperature and pressure. The relative standard uncertainty of the stability of trace-moisture generation of the DTG is 0.006 (0.6%). The effect of temperature on the stability of humidity generation of the DTG is smaller than that of a frost-point generator. (c) 2006 Elsevier B.V. All rights reserved.

引用

页码：202 / 208

页数：7

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