1x2 MOEMS switch based on silicon-oninsulator and polymeric waveguides

被引：12

作者：

Bakke, T

Tigges, CP

Sullivan, CT

机构：

[1] Sandia Natl Labs, Albuquerque, NM 87185 USA

[2] Norwegian Univ Sci & Technol, Dept Phys Elect, N-7491 Trondheim, Norway

来源：

ELECTRONICS LETTERS | 2002年 / 38卷 / 04期

关键词：

D O I：

10.1049/el:20020110

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

A new planar optical switch concept based on a silicon-on-insulator microelectromechanical system (MEMS) structure with post-processed polymeric waveguides is reported. The actuation voltage is 20 to 50 V, and the switching time as low as 30 Vs. A crosstalk of -32 dB has been measured.

引用

收藏

页码：177 / 178

页数：2

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