A silicon avalanche photodiode for single optical photon counting in the Geiger mode

Avalanche photodiodes (APDs) can be used in the so-called Geiger mode to count single optical photons. in this mode the diode is biased above its breakdown voltage. The absorption of a single photon initiates avalanche breakdown, which can easily De detected. Prototypes of an area-efficient structure for Geiger-mode dedicated APDs have been designed, fabricated and tested. These structures have been created within the framework of a project to integrate arrays of these devices. The prototypes can be used for photon counting. They do, however, suffer from afterpulsing, which is caused by traps originating from damage caused by an implantation in the fabrication process.