High-speed roll-to-roll nanoimprint lithography on flexible plastic substrates

被引:518
作者
Ahn, Se Hyun [2 ]
Guo, L. Jay [1 ]
机构
[1] Univ Michigan, Dept Elect Engn & Comp Sci, Ann Arbor, MI 48109 USA
[2] Univ Michigan, Dept Mech Engn, Ann Arbor, MI 48109 USA
关键词
D O I
10.1002/adma.200702650
中图分类号
O6 [化学];
学科分类号
0703 ;
摘要
Nanograting structures in either thermally or UV curable resist are continuously fabricated on a flexible plastic substrate by a high-speed roll-to-roll nanoimprint apparatus (see figure). As an example of the applications of such a roll-to-roll imprinting process, a high-performance metal wire-grid polarizer is demonstrated.
引用
收藏
页码:2044 / +
页数:7
相关论文
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