A transient model for the sublimation growth of silicon carbide single crystals

被引:18
作者
Bubner, N [1 ]
Klein, O [1 ]
Philip, P [1 ]
Sprekels, J [1 ]
Wilmanski, K [1 ]
机构
[1] Weierstr Inst Angew Anal & Stochast, D-10117 Berlin, Germany
关键词
modelling; sublimation growth; heat and mass transfer; numerical simulation; conservation laws; partial differential equations;
D O I
10.1016/S0022-0248(99)00274-2
中图分类号
O7 [晶体学];
学科分类号
0702 ; 070205 ; 0703 ; 080501 ;
摘要
We present a transient model for the Modified Lely. Method for the sublimation growth of SiC single crystals which consists of all conservation laws including reaction-diffusion equations. The model is based on a mixture theory for the gas phase. First numerical results illustrate the influence of the geometrical set-up inside the reactor on the evolution of the temperature distribution. (C) 1999 Elsevier Science B.V. All rights reserved.
引用
收藏
页码:294 / 304
页数:11
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