Novel hydrogen gas sensor based on single ZnO nanorod

被引:320
作者
Lupan, Oleg [1 ,2 ]
Chai, Guangyu [3 ]
Chow, Lee [1 ]
机构
[1] Univ Cent Florida, Dept Phys, Orlando, FL 32816 USA
[2] Tech Univ Moldova, Dept Microelect & Semicond Devices, MD-2004 Kishinev, Moldova
[3] Apollo Technol Inc, Lake Mary, FL 32746 USA
关键词
Nanofabrication; Nanoscale materials and structures; Gas sensor; Hydrogen; ZnO nanorod;
D O I
10.1016/j.mee.2008.06.021
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
For extensive use in an industrialized process of individual ZnO nano/microrods as building nanoblock in novel hydrogen sensors, a simple, inexpensive, and bio-safe synthesis process and nanofabrication route is required. Here, we report a cost-effective and fast synthesis route for ZnO one-dimensional nanorod using an aqueous-based approach in a reactor. Our synthesis technique permits nano/microrods to be easily transferred to other substrates and to be distributed on the surface. This flexibility of substrate choice opens the possibility of using focused ion beam (FIB/SEM) system for handling and fabricating nanosensors. The main advantage of this procedure is a quick verification/testing of concept and is compatible with micro/nanoelectronic devices. The described nanofabrication steps permitted us to obtain a 90% success rate for building single nanorod sensor. A sensitivity of similar to 4% was obtained for a single ZnO nanorod hydrogen sensor at 200 ppm H(2) in the air at room temperature. The nanosensor has a high selectivity for H(2), since its sensitivity for O(2), CH(4), CO, ethanol or LPG are less than 0.25%. (C) 2008 Elsevier B.V. All rights reserved.
引用
收藏
页码:2220 / 2225
页数:6
相关论文
共 37 条
[1]  
[Anonymous], 361451 JOINT COMM PO
[2]  
*BAS EN SCI ADV CO, 2003, BAS RES NEEDS ASS SE
[3]   Optical and field emission properties of ZnO nanorod arrays synthesized on zinc foils by the solvothermal route [J].
Dev, A ;
Kar, S ;
Chakrabarti, S ;
Chaudhuri, S .
NANOTECHNOLOGY, 2006, 17 (05) :1533-1540
[4]   Dye sensitized solar cells using well-aligned zinc oxide nanotip arrays [J].
Du Pasquier, Aurelien ;
Chen, Hanhong ;
Lu, Yicheng .
APPLIED PHYSICS LETTERS, 2006, 89 (25)
[5]   Fast electron transport in metal organic vapor deposition grown dye-sensitized ZnO nanorod solar cells [J].
Galoppini, Elena ;
Rochford, Jonathan ;
Chen, Hanhong ;
Saraf, Gaurav ;
Lu, Yicheng ;
Hagfeldt, Anders ;
Boschloo, Gerrit .
JOURNAL OF PHYSICAL CHEMISTRY B, 2006, 110 (33) :16159-16161
[6]   Regularly shaped, single-crystalline ZnO nanorods with wurtzite structure [J].
Guo, L ;
Ji, YL ;
Xu, HB ;
Simon, P ;
Wu, ZY .
JOURNAL OF THE AMERICAN CHEMICAL SOCIETY, 2002, 124 (50) :14864-14865
[7]  
HARTNAGEL H., 1995, Semiconducting Transparent Thin Films
[8]  
Heiland G., 1983, CHEM SENSOR TECHNOLO, V1, P113
[9]   Hydrogen and ozone gas sensing using multiple ZnO nanorods [J].
Kang, BS ;
Heo, YW ;
Tien, LC ;
Norton, DP ;
Ren, F ;
Gila, BP ;
Pearton, SJ .
APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING, 2005, 80 (05) :1029-1032
[10]   Simple solvothermal route to synthesize ZnO nanosheets, nanonails, and well-aligned nanorod arrays [J].
Kar, Soumitra ;
Dev, Apurba ;
Chaudhuri, Subhadra .
JOURNAL OF PHYSICAL CHEMISTRY B, 2006, 110 (36) :17848-17853