Mechanical behavior of 30-50 mn thick aluminum films under uniaxial tension

被引：118

作者：

Haque, MA ^{[1
]}

Saif, MTA ^{[1
]}

机构：

[1] Univ Illinois, Dept Mech & Ind Engn, Urbana, IL 61820 USA

来源：

SCRIPTA MATERIALIA | 2002年 / 47卷 / 12期

关键词：

aluminum; thin films; mechanical properties; MEMS;

D O I：

10.1016/S1359-6462(02)00306-8

中图分类号：

TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

We present uniaxial tensile test results for 30-50 nm thick freestanding aluminum films. Young's modulus and ductility were found to decrease monotonically with grain size. Reverse Hall-Petch behavior was observed with no appreciable room temperature creep. Non-linear elasticity with small irreversible deformation was observed for 50 nm thick specimens. (C) 2002 Acta Materialia Inc. Published by Elsevier Science Ltd. All rights reserved.

引用

页码：863 / 867

页数：5

共 21 条

[1] Overview no. 130 - Size effects in materials due to microstructural and dimensional constraints: A comparative review
Arzt, E
[J]. ACTA MATERIALIA, 1998, 46 (16) : 5611 - 5626
[2] BURTON B, 1977, DIFFUSIONAL CREEP PO, P83
[3] Interface controlled diffusional creep of nanocrystalline pure copper
Cai, B
Kong, QP
Lu, L
Lu, K
[J]. SCRIPTA MATERIALIA, 1999, 41 (07) : 755 - 759
[4] Nanoindentation of amorphous aluminum oxide films .3. The influence of the substrate on the elastic properties
Chechenin, NG
Bottiger, J
Krog, JP
[J]. THIN SOLID FILMS, 1997, 304 (1-2) : 70 - 77
[5] ON THE VALIDITY OF THE HALL-PETCH RELATIONSHIP IN NANOCRYSTALLINE MATERIALS
CHOKSHI, AH
ROSEN, A
KARCH, J
GLEITER, H
[J]. SCRIPTA METALLURGICA, 1989, 23 (10): : 1679 - 1683
[6] Gottstein G., 1999, CRC MAT SCI TECHNOL
[7] Gutkin M. Yu., 2001, Reviews on Advanced Materials Science, V2, P80
[8] A model for the deformation of nanocrystalline materials
Hahn, H
Padmanabhan, KA
[J]. PHILOSOPHICAL MAGAZINE B-PHYSICS OF CONDENSED MATTER STATISTICAL MECHANICS ELECTRONIC OPTICAL AND MAGNETIC PROPERTIES, 1997, 76 (04): : 559 - 571
[9] HAQUE A, IN PRESS SENS ACT A
[10] In-situ tensile testing of nano-scale specimens in SEM and TEM
Haque, MA
Saif, MTA
[J]. EXPERIMENTAL MECHANICS, 2002, 42 (01) : 123 - 128

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