Design, fabrication, and performance of infrared and visible vertical-cavity surface-emitting lasers

被引：175

作者：

Chow, WW

Choquette, KD

Crawford, MH

Lear, KL

Hadley, GR

机构：

[1] Sandia National Laboratories, Albuquerque

[2] Micro Optical Devices, Inc., Albuquerque

[3] Department of Physics and Astronomy, University of New Mexico, Albuquerque, NM

[4] Sandia National Laboratories, Albuquerque, NM

[5] University of Arizona, Tucson, AZ

[6] University of Colorado, Boulder, CO

[7] AT and T Bell Laboratories, Murray Hill, NJ

[8] Holy Cross College, Worcester, MA

[9] Brown University, Providence, RI

来源：

IEEE JOURNAL OF QUANTUM ELECTRONICS | 1997年 / 33卷 / 10期

关键词：

optoelectronic devices; semiconductor device fabrication; semiconductor lasers;

D O I：

10.1109/3.631287

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

This paper discusses the issues involving the design and fabrication of vertical-cavity surface-emitting lasers (VCSEL's). A review of the basic experimental structures is given, with emphasis on recent developments in distributed Bragg reflectors, gain media, as well as current and optical confinement techniques. The paper describes present VCSEL performance, in particular, those involving selective oxidation and visible wavelength operation.

引用

页码：1810 / 1824

页数：15

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