Observation of carbon clusters of a few nanometers in the oxyacetylene diamond CVD process

被引：19

作者：

Ahn, HS

Park, HM

Kim, DY

Hwang, NM

机构：

[1] Seoul Natl Univ, Sch Mat Sci & Engn, Ctr Microstruct Sci Mat, Seoul 151742, South Korea

[2] Korea Res Inst Stand & Sci, Taejon 305600, South Korea

来源：

JOURNAL OF CRYSTAL GROWTH | 2002年 / 234卷 / 2-3期

关键词：

nanostructure; nucleation; chemical vapor deposition processes; diamond;

D O I：

10.1016/S0022-0248(01)01748-1

中图分类号：

O7 [晶体学];

学科分类号：

0702 ; 070205 ; 0703 ; 080501 ;

摘要：

We observed the carbon clusters by TEM after capturing them on a grid membrane during the oxyacetylene flame diamond synthesis. The clusters of similar to1.5 nm captured on the amorphous membrane in the gas mixture of the acetyleneto-oxygen ratio of 1.04 were mostly amorphous with a few having a diamond lattice. The clusters larger than 5 nm captured at the gas ratio of 1.09 were mostly graphite with a minor fraction of diamond. (C) 2002 Elsevier Science B.V. All rights reserved.

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收藏

页码：399 / 403

页数：5

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