Touch mode capacitive pressure sensors

被引：190

作者：

Ko, WH ^{[1
]}

Wang, Q ^{[1
]}

机构：

[1] Case Western Reserve Univ, Dept Elect Engn & Comp Sci, Cleveland, OH 44106 USA

来源：

SENSORS AND ACTUATORS A-PHYSICAL | 1999年 / 75卷 / 03期

基金：

美国国家科学基金会;

关键词：

capacitive sensor; pressure sensor; touch mode capacitive device; capacitance to frequency converter; Si-Si capacitors;

D O I：

10.1016/S0924-4247(99)00069-2

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

Touch mode capacitive pressure sensors offer better performance in industrial applications than other devices. In touch mode operation, the diaphragm of the capacitive pressure sensor touches the substrate structure in operation range. The advantages of this mode of operation are near-linear output characteristics, large over-range pressure and robust structure that make it capable to withstand harsh industrial field environment. The principle, design, and characteristics of touch mode capacitive pressure sensors using various materials and technologies are discussed in this paper. (C) 1999 Elsevier Science S.A. All rights reserved.

引用

页码：242 / 251

页数：10

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