Effects of Pt seedlayer and Ar pressure on magnetic and structural properties of sputtered CoNi/Pt multilayers

被引:19
作者
Meng, Q
deHaan, P
vanDrent, WP
Lodder, JC
Popma, TJA
机构
[1] MESA Research Institute, University of Twente, Enschede, P. O. Box 217
关键词
D O I
10.1109/20.539264
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
CoNi/Pt multilayers were prepared by magnetron sputtering using Ar gas. Effects of Pt seedlayer and Ar sputtering pressure on magnetic and structural properties are investigated. Microstructures of multilayers were analysed using XRD and TEM. It was found that perpendicular magnetic anisotropy and coercivity increase with increasing either the thickness of Pt seedlayer or Ar pressure. The causes of increases in perpendicular anisotropy and coercivity are discussed in relation to the interface roughness, the curvature of layers and the columnar structures.
引用
收藏
页码:4064 / 4066
页数:3
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